Non-destructive detection of micrometric internal features within EEE microelectronic systems.
- Posted by Francisco Javier Aparicio Rebollo
- On September 3, 2019
- 0
Micrometric-wide internal features of sub-micrometric thickness can be easily detected in our recently upgraded instrument. The high lateral resolution is within the current state of the start in the non-destructive inspection of deeply embedded objects.